High-purity gas pressure monitoring

Pressure monitoring is indispensable for high-purity gases from storage, transportation, distribution to exhaust treatment. The pressure transmitters independently developed and produced by Mic Sensor are powerful instruments for accurately obtaining high-purity gas pressure information. They are an ideal choice for users who need to ensure the safety, stability, pollution-free supply system, and meet process manufacturing requirements.

Application Challenges:
1. High-grade gas leakage rate;
2. High requirements for long-term stability and reliability;
3. Various corrosive gas media;
4. High cleanliness requirements;
5. Limited installation space for some equipment;

Advantages of the Solution:
1. High product sealing, helium leakage rate: ≤5×10⁻¹² Pa·m³/s;
2. High cleanliness, production site: Class 100 cleanroom;
3. Surface treatment: electropolishing, compliant with SEMI F19; surface roughness: typical value ≤0.13μm, maximum ≤0.18μm;
4. Good corrosion resistance, wetted materials stainless steel 316L VAR+VIM compliant with SEMI F20;
5. Good long-term stability, long-term stability ±0.25% FS/year, high EMC protection level, zero point adjustable;
6. Structural features: compact and small, suitable for narrow spaces.

关键词： High-purity gas pressure monitoring

None

Recommended Products